3.27.1.20191218 EZ-EDS版本生成的电子数据表设备网美元电子数据表电子数据表生成的海温EDS编辑器使用美元版权(C) 1998 s技术公司。[文件]DescText =“日立金属有限公司通过无铅认证Pressure-Insensitive数字质量流量控制器EDS文件”;CreateDate = 08-03-2012;CreateTime = 09:00:00;ModDate = 01-15-2020;ModTime = 15:04:29;修订= 1.0;(设备)VendCode = 180;VendName =“日立金属有限公司”;ProdType = 39;ProdTypeStr =“质量流量控制器、增强”; ProdCode = 4848; MajRev = 5; MinRev = 1; ProdName = "FC-PIX98"; Catalog = "FC-PIX98"; [IO_Info] Default = 0x0001; PollInfo = 0x0001, 2, 1; Input1 = 2, 0, 0x0001, "Flow", 6, "20 04 24 01 30 03", "Assembly instance 1"; Input2 = 3, 0, 0x0001, "Status,Flow", 6, "20 04 24 02 30 03", "Assembly instance 2 - Default Input"; Input3 = 5, 0, 0x0001, "Status,Flow,Valve", 6, "20 04 24 03 30 03", "Assembly instance 3"; Input4 = 8, 0, 0x0001, "Status,Flow,SP,Override,Valve", 6, "20 04 24 06 30 03", "Assembly instance 6"; Input5 = 5, 0, 0x0001, "Status,Flow(REAL)", 6, "20 04 24 0E 30 03", "Assembly instance 14"; Input6 = 14, 0, 0x0001, "Stat,Flow,SP,Ovrride,Valve(REAL)", 6, "20 04 24 12 30 03", "Assembly instance 18"; Input7 = 7, 0, 0x0001, "Status,Flow,Pressure,Temperature", 6, "20 04 24 15 30 03", "Assembly 21"; Input8 = 9, 0, 0x0001, "Status,Flow,Valve,Pressure,Temp", 6, "20 04 24 16 30 03", "Assembly 22"; Input9 = 13, 0, 0x0001, "Status,Flow,Pressure,Temperature(REAL)", 6, "20 04 24 17 30 03", "Assembly 23"; Output1 = 2, 0, 0x0001, "Setpoint", 6, "20 04 24 07 30 03", "Assembly instance 7 - Default Output"; Output2 = 3, 0, 0x0001, "Override,Setpoint", 6, "20 04 24 08 30 03", "Assembly instance 8"; Output3 = 4, 0, 0x0001, "Setpoint(REAL)", 6, "20 04 24 13 30 03", "Assembly instance 19"; Output4 = 5, 0, 0x0001, "Override+Setpoint(REAL)", 6, "20 04 24 14 30 03", "Assembly instance 20"; [ParamClass] MaxInst = 4; Descriptor = 0x0009; CfgAssembly = 0; [Params] Param1 = 0, 0,"", 0x0000, 0xCA, 4, "Outlet Pressure", "", "Pressure in psia measured at the outlet of the MFC (REAL)", 0,100,0, ,,,, ,,,, 0; Param2 = 0, $ reserved, shall equal 0 ,, $ Link Path Size, Link Path 0x0000, $ Descriptor 0xC2, $ Data Type 1, $ Data Size in bytes "Unit orientation", $ name "", $ units "Physical orientation of the unit when mounted", $ help string 1,4,1, $ min, max, default data values ,,,, $ mult, div, base, offset scaling ,,,, $ mult, div, base, offset links 0; $ decimal places Param3 = 0, 0,"", 0x0010, 0xDA, 1, "Firmware part number", "", "Firmware part number", 0,255,"Z46100005-004A", ,,,, ,,,, ; Param4 = 0, $ reserved, shall equal 0 0,"", $ Link Path Size, Link Path 0x0000, $ Descriptor 0xC8, $ Data Type 4, $ Data Size in bytes "Turn on delay", $ name "", $ units "Turn on delay", $ help string 0,65535,0, $ min, max, default data values ,,,, $ mult, div, base, offset scaling ,,,, $ mult, div, base, offset links 0; $ decimal places [Groups]